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Application Review Date
The First Review Date for this job is: 8/22/18
The position exists to provide professional engineering development and maintenance support of facilities and equipment in the ERSO/Nanofabrication Laboratory, a.k.a the NanoLab. The NanoLab is a unique 15,000 square ft. clean-room maintaining and providing access to more than 170 pieces of semiconductor process equipment and metrology systems which serve the research needs of more than 450 researchers, faculty and approved startups.
Under general direction, the incumbent operates independently in a specialized engineering phase of a major training and/or research effort. Assignments typically require concentration in a field of application where subject matter knowledge relevant to research objectives and methodology is of great value in understanding and establishing engineering design criteria.
Equipment Support: State-of-the-art semiconductor process equipment requires procurement or fabrication, siting, installation and facilitation, development, maintenance, repair, and modification in response to process and experimental needs. The NanoLab presently supports more than 170 pieces of micro and nano fabrication process equipment. Each piece of equipment has a primary and back up R&D engineer assigned for day-to-day oversight and support. Equipment engineers work in concert with process engineers to maintain and modify equipment to meet research needs and report equipment status and needs to Equipment Manager, Facilities Manager and Director.
Facilities Support: Class-100, cleanroom requires special engineering considerations for air handling. Room pressures, chemical fume exhaust, temperature and humidity must all be monitored and maintained within specific ranges. Utilities, such as air conditioning, compressed air, cyrogens, deionized water, nitrogen, oxygen, ultrapure process gases and electrical power must be monitored and reliably provided. In concert with Lab Management team, especially the facilities manager, all NanoLab R&D engineers make recommendations and develop plans to meet the specific requirements of the equipment and processes for which they are responsible.
Process Support: For best equipment performance and therefore improved research results, most specialty equipment requires R&D engineers to become resident experts in their operation and then work one-on-one with laboratory researchers. Scanning electron microscopy, electron beam lithography, laser scanning confocal microscopy are example technical capabilities for which NanoLab and Principal Investigators make significant financial investment and require a dedicated engineering staff support for best research results. Specific, equipment assignments are broader than these example technologies and are revaluated on a regular basis to meet faculty and researcher needs.
Computer Reporting: NanoLab infrastructure includes significant computer monitoring and control systems. Equipment, utilities and processes are all tracked and integrated via custom developed database reporting systems. All engineers are required to become fluent with monitoring their assigned systems, and report their activities using these custom operating systems. As an in house developed and maintained system, these programs are under constant review and improvement. Engineers are also expected to make recommendations to improve the efficiency and capability of these programs to facilitate their work assignments.
30% Equipment and Process Development: Provide a broad range of professional semiconductor equipment engineering services for supporting equipment used in research projects. Provide engineering information and advice to Principal Investigators and/or faculty and research personnel with administrative responsibility for the research program or teaching facility. Meet with graduate researchers and principal investigators to design equipment modifications to meet special semiconductor process needs or to resolve equipment issues.
Site new equipment, modify and upgrade existing equipment and their ancillary systems. Upgrade tasks may include but are not limited to - determine project specifications and parameters. Prepare CAD and hand drawings and schematics as needed. Submit machine shop orders for the custom fabrication of assemblies and parts. Design, construct, assemble and test experimental equipment and systems. Assist in developing recipes. Use critical thinking to solve complex problems. Work in teams as required. Contribute designs to develop and improve tools and tool reliability.
30% Equipment Troubleshooting and Repair. Sample subsystems: Troubleshoot and repair electronics. This includes but is not limited to DC, RF, and microwave power supplies; matching networks, logic and control systems.
Troubleshoot and repair mid-range, high, and ultra-high high vacuum systems. This includes but is not limited to pumping systems (cryopumps; ionpumps; turbo-molecular pumps; oil, perfluorinated ether and nitrogen cooled rotary vane pumps); associated valves, manifolds and control systems; gauging and pressure control systems. Calibrate and repair vacuum metrology. Detect and resolve vacuum leak issues.
Troubleshoot and repair high-purity, inert, non-toxic, corrosive and toxic gas delivery systems. This includes but is not limited to temperature based mass flow controllers, pressure based gas flow controllers, pneumatic and manual valving, and all associated plumbing.
Troubleshoot and repair temperature maintenance systems. This includes but is not limited to water, glycol, freon, and peltier based cooling systems; resistance, induction and, infrared heating systems; thermocouple, RTD, and optical pyrometer temperature measurement systems.
For all subsystems troubleshoot and repair logic based control systems, low voltage cabling, calibrate components as required, recommend component upgrades.
20% Equipment Maintenance and Sustaining Operations: Schedule and perform preventative maintenance. Maintain a spare parts inventory. Provide part numbers for purchase. Liaison with vendors for support services. Identify second source (non OEM) suppliers especially for legacy equipment. Network with similar academic laboratories for best practice recommendations.
Support equipment operating systems and programmable logic controllers. Work as a team member with the NanoLab computer support staff as needed. Backup software and hard drives.
10% Understand and use the Mercury database to mark equipment status, enable tools, enter comments and problem reports and add needed support documents. Writes annual report and additional reports as needed. Write, edit and revise equipment manuals, support documents, startup and shutdown procedures.
10% Assist in the development of, and follow standard operating procedures and best known methods for safety and to prevent injuries. Practice and comply with safe working practices to assure personal safety and safety to the lab environment for colleagues and researchers. Understand and work within guidelines to protect the environment.
Provide direction, guidance and training to less experienced engineers, staff and students. Offer instruction and training in support of staff development and equipment, support, and repair.
The comprehensive knowledge required to independently perform the range of tasks required to support semiconductor process equipment.
Experience and practical skills with the tools required for equipment support.
A working knowledge of engineering design principals, basic science and the practices and procedures required to complete engineering assignments.
Critical thinking, problem solving, strong analytic and good judgement skills, organizational skills and decision-making abilities needed to prioritize and complete work assignments.
The ability to meet deadlines and adhere to high standards of reliability, quality and cleanliness.
The ability to make appropriate recommendations to improve equipment and laboratory operations.
Effective computer use, writing skills and the ability to verbally communicate with colleagues, researchers and vendors.
The ability to work alone, or in a team to identify issues, recommend solutions, solve problems and produce results.
A.A.S, E.E.T. or Bachelor's degree in science or engineering, or equivalent industrial experience and a proven track record of semiconductor equipment support and facilities engineering.
Experience in the repair, modification, trouble shooting and support of DC, RF, microwave, high-voltage and other electronic circuits.
PC/logic control experience.
Experience with mechanical systems and robotics as pertains to wafer transport and handling.
A working understanding of high vacuum components, pumps, systems, vacuum gauging, leak detection and vacuum science.
Experience with high-purity gas delivery, gas manifolds, mass flow controllers and gas control mechanism.
Experience with thin film deposition equipment via physical vapor deposition (PVD), chemical vapor deposition (PECVD and LPCVD), atomic layer deposition (ALD).
Familiarity with thin films etching via gas phase plasma processing (RIE, DRIE, pulsed gas DRIE).
Basic computing and writing skills.
Salary & Benefits
For information on the comprehensive benefits package offered by the University visit:
The University of California was chartered in 1868 and its flagship campus - envisioned as a "City of Learning" - was established at Berkeley, on San Francisco Bay. Today the world's premier public university and a wellspring of innovation, UC Berkeley occupies a 1,232 acre campus with a sylvan 178-acre central core. From this home its academic community makes key contributions to the economic and social well-being of the Bay Area, California, and the nation.